영문가스명 국문가스명 기호 측정범위
Acetic Acid 아세트산 CH3CO2H 0-100%LEL
Acrylonitrile 아크릴로니트릴 C3H3N 0-200 ppm
Acetic Acid 아세트산 CH3CO2H 0-100%LEL
Alcohol 알코올 CH3OH 0-100%LEL
Ammonia 암모니아 NH3 0-200 ppm
Antimony Pentachloride 오염화안티몬 SbCl5 0.0-20.0 ppm
Arsenic Pentachloride 비소펜타클로라이드 AsCl5 0.0-20.0 ppm
Arsenic Pentafluoride 비소펜타플로라이드 AsF5 0.0-20.0 ppm
Arsenic Trichloride 삼염화비소 AsCl3 0.0-20.0 ppm
Arsenic Trifluoride 비소삼불화물 AsF3 0.0-20.0 ppm
Arsine 아르신 AsH3 0.0-1.00 ppm
Benzene 벤젠 C6H6 0-100%LEL
Boron Trichloride 삼염화붕소 BCl3 0.0-1.00 ppm
Boron Trifluoride 삼불화붕소 BF3 0.0-20.0 ppm
Bromine 브로민 Br2 0.0-5.0 ppm
Carbon Dioxide 이산화탄소 CO2 0-2 %Vol
Carbon Monoxide 일산화탄소 CO 0-200 ppm
Carbon Tetrachloride 삼염화탄소 CCl4 0-100 ppm
Carbonyl Difluoride 이불화카보닐 COF2 0.0-20.0 ppm
Chlorine 염소 Cl2 0.0-5.0 ppm
Chlorine Dioxide 이산화염소 ClO2 0.0-5.0 ppm
Chlorine Trifluoride 염소트리플루오르화 ClF3 0.0-20.0 ppm
Chloro-Benzene 클로로벤젠 C6H5Cl 0-100 ppm
Chloro-Fluorocarbons 염화불화탄소 CFCs 0-100 ppm
Chloroform 클로로포름 CHCl3 0-100 ppm
Combustible 가연성가스 LEL 0-100%LEL
Diborane 다이보레인 B2H6 0.0-1.00 ppm
Dichloroethane 디클로로엔탄 C2H4Cl4 0-100 ppm
Dichlorosilane 디클로로실란 SiH2Cl2 0.0-20.0 ppm
Difluoromethane 이불화메탄 CH2F2 0-100 ppm
Disilane 다이실레인 Si2H6 0.0-1.00 ppm
Fluorine 불소 F2 0.0-5.0 ppm
Fluorosulfonic Acid 플루오로황산 HSO3F 0.0-20.0 ppm
Germane 게르만 GeH4 0.0-5.0 ppm
Germane 게르만 GeH4 0.0-5.0 ppm
Germanium Tetrachloride 게르마늄테트라클로라이드 GeCl4 0.0-20.0 ppm
Germanium Trichloride 게르마늄트라이클로라이드 GeCl3 0.0-20.0 ppm
Halon 1211 하론1211 Halon 1211 0-100 ppm
Halon 1301 하론1301 Halon 1301 0-100 ppm
Halon 2402 하론2402 Halon 2402 0-100 ppm
HCFCs (Freons) 히드로클로로티아지드 Freons 0-100 ppm
Hexane 헥산 C6H14 0-100%LEL
Hydrazine 하이드라진 N2H4 0.0-1.00 ppm
Hydrogen 수소 H2 0-100%LEL
Hydrogen Bromide 브로민화수소 HBr 0.0-20.0 ppm
Hydrogen Chloride 염화수소 HCl 0.0-20.0 ppm
Hydrogen Cyanide 사이안화수소 HCN 0-50 ppm
Hydrogen Fluoride 플루오린화수소/불산 HF 0.0-20.0 ppm
Hydrogen Iodide 아이오딘화수소 HI 0.0-20.0 ppm
Hydrogen Peroxide 과산화수소 H2O2 0.0-5.0 ppm
Hydrogen Sulfide 황화수소 H2S 0-50 ppm
Iodine 아이오딘 I2 0.0-5.0 ppm
Isopropyl Alcohol 이소프로필알코올 C3H7OH 0-100%LEL
Methane 메탄 CH4 0-100%LEL
Methyl Bromide 메틸브로마이드 CH3Br 0-200 ppm
Methyl Chloride 염화메틸 CH3Cl 0-200 ppm
Methyl Iodide 아이오딘화메틸 CH3l 0-200 ppm
Methyl Chloroform 메틸클로로폼 CH3Cl 0-100 ppm
Methylene Chloride 메틸렌클로라이드 CH2Cl2 0-100 ppm
Molybdenum Fluoride 몰리브데넘플로라이드 MoF4 0.0-20.0 ppm
Molybdenum Hexafluoride 몰리브데넘헥사플로라이드 MoF6 0.0-20.0 ppm
Molybdenum Pentachloride 펜타클로라이드 MoCl5 0.0-20.0 ppm
Methyl Iodide 아이오딘화메틸 CH3l 0-200 ppm
Methyl Chloride 염화메틸 CH3Cl 0-200 ppm
Methyl Iodide 아이오딘화메틸 CH3l 0-200 ppm
Nitric Acid Vapors 질산증기 HNO3 0.0-20.0 ppm
Nitric Oxide 일산화질소 NO 0-100 ppm
Nitrogen Dioxide 이산화질소 NO2 0.0-20.0 ppm
Nitrogen Trifluoride 삼불화질소 NF3 0-100 ppm
Nitrogen Tetroxide 사산화질소 N2O4 0.0-20.0 ppm
Oxygen 산소 CH3l ppm
Chloride 염화메틸 O2 0.0-25.0 %Vol
Ozone 오존 O3 0.0-20.0 ppm
Phosgene 포스겐 COCl2 0.0-1.00 ppm
Phosphine 포스핀 PH3 0.0-1.00 ppm
Phosphorous Oxychloride 옥시염화인 POCl3 0.0-20.0 ppm
Phosphorous Pentachloride 오염화인 PCl5 0.0-20.0 ppm
Phosphorous Pentafluoride 오불화인 PF5 0.0-20.0 ppm
Phophorous Trichloride 삼염화인 PCL3 0.0-20.0 ppm
Phosphorous Trifluoride 삼불화인 PF3 0.0-20.0 ppm
Propane 프로판 C5H12 0-100%LEL
Silane 실레인 SiH4 0.0-50.0 ppm
Silicon Tetrachloride 삼염화규소 SiCl4 0.0-20.0 ppm
Silicon Tetrafluoride 사불화규소 SiF4 0.0-20.0 ppm
Sulfur Dioxide 이산화황 SO2 0.0-20.0 ppm
Sulfur Tetrafluoride 사플루오린화황 SF4 0.0-20.0 ppm
Sulfuric Acid Vapors 황산증기 H2SO4 0.0-20.0 ppm
Tantalum Fluoride 오산화탄탈럼 TaF5 0.0-20.0 ppm
Tetrachloroethylene 테트라클로로에틸렌 C2Cl4 0-100 ppm
Tetraethyl-Orthosilicate 테트라에틸오소실리케이트 TEOS 0-100 ppm
Tin Tetrachloride 염화제이주석 SnCl4 0.0-20.0 ppm
Titanium Fluoride 티타늄플루오라이드 TiF4 0.0-20.0 ppm
Titanium Tetrachloride 사염화티탄 TiCl3 0.0-20.0 ppm
Trichloroethylene 트리클로로에틸렌 C2HCl3 0-100 ppm
Trichlorosilane 트리클로로실란 SiHCl3 0.0-20.0 ppm
Tungsten Hexachloride 텡스텐육염화물 WCl6 0.0-20.0 ppm
Tungsten Hexafluoride 물화텅스텐 WF6 0.0-20.0 ppm
Vynyl Chloride 염화바이닐 CH2CHCl 0-100 ppm
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